Fort Lewis College Nano Lab

Photolithography Exposure Calculator

Calculate exposure time based on required dose and measured intensity:

Oxide Thickness Calculator (Deal–Grove)

Computes final oxide thickness using the Deal–Grove model: x² + A·x = B·(t + τ), where τ = (x0² + A·x0)/B.

Units here are nm and minutes. You can use the preset A/B (placeholders) or enter your manual’s values.

Oxidation Time (minutes):

Initial Oxide x₀ (nm):

Preset (optional):

Linear Constant A (nm): A has units of length (nm).

Parabolic Constant B (nm²/min): B has units of length²/time (nm²/min).

Final Oxide Thickness x(t): - nm

Also: x(t) − x₀ = - nm, τ = - min

Etch Rate & Time Calculator

Calculate % over etch.

Nanofabrication Calculators